Basic confi guration
- The cabinets vary depending on the components / options
- Chamber volume: depending on the version 18 - 36 liters
- Power supply: 230 V AC for table top system,
400 V AC / 3 phases for stand alone system Gas supply
- Needle valves
- Mass-Flow-Controller (MFCs) Vacuum chambers
- Stainless steel
round with cover
(approx. Ø 267 mm, L 420 mm or L 600 mm) or
rectangular with hinged door
(approx. W 240 mm x H 240 mm x D 420 mm or 600 mm)
- Aluminium
round with cover or with hinged door
(approx. inner Ø 240 mm, opening Ø 230 mm,
L 400 mm or L 600 mm)
- Quartz glass (UHP)
round with cover or with hinged door
(approx. inner Ø 240 mm, opening Ø 230 mm,
L 400 mm or L 600 mm)
- Borosilicate glass (UHP)
round with cover or with hinged door
(approx. inner Ø 240 mm, opening Ø 230 mm,
L 400 mm or L 600 mm) Loading
Tray (option: water-cooled), quartz glass boats,
rotary drum for powder, rotary drum for bulk materials,
fl at tray aluminium, fl at tray stainless steel,
fl at tray borosilicate glass, fl at tray quartz glass Electrodes
- One or multi level electrode
- RIE-electrode Control
- Semi automatic
- PCCE-control (Microsoft Windows CE)
- PC-control (Microsoft Windows XPE) Timer
- Digital Generators
- Frequencies: 40 kHz: Power 0 - 300 W; 0 - 1000 W
13.56 MHz: Power 0 - 100 W; 0 - 300 W
2.45 GHz: Power 0 - 600 W
All generators are continuously adjustable from 0 - 100 % Vacuum pumps
- in different sizes from different manufacturers
(if necessary with active carbon fi lter)
